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MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
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Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MPX4080D series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features * 3.0% Maximum Error over 0 to 85C * Ideally suited for Microprocessor or Microcontroller-Based Systems * Temperature Compensated from -40 to 105C * Easy-to-Use, Durable Epoxy Unibody Package Figure 1 shows a block diagram of the internal circuitry integrated on the pressure sensor chip.
VS
MPX4080D
INTEGRATED PRESSURE SENSOR 0 to 80 kPa (0 to 11.6 psi) 0.58 to 4.9 Volts Output
UNIBODY PACKAGE
MPX4080D CASE 867 NOTE: Pin 1 is the notched pin.
SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1
GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY
PIN NUMBER
1
Vout
Vout Gnd VS
4 5 6
N/C N/C N/C
2 3
PINS 4, 5 AND 6 ARE NO CONNECTS GND
NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead.
Figure 1. Fully Integrated Pressure Sensor Schematic
REV 1
Motorola Sensor Device Data (c) Motorola, Inc. 2002
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MPX4080D
MAXIMUM RATINGS(NOTE)
Parametrics Maximum Pressure Storage Temperature (P1 > P2) (P2 > P1) Symbol Pmax Tstg Value 400 400 -40 to +125 Unit kPa C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4
required to meet electrical specifications.) Characteristic Pressure Supply Range(1) Symbol POP VS Io (0 to 85C) Voff VFSO VFSS -- V/P Min 0 4.85 -- 0.478 4.772 -- -- -- Typ -- 5.1 7.0 0.575 4.900 4.325 -- 54 Max 80 5.35 10 0.672 5.020 -- "3.0 -- Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa
Voltage(2)
Supply Current Minimum Pressure Offset(3) @ VS = 5.1 Volts Full Scale Output(4) @ VS = 5.1 Volts Full Scale Span(5) @ VS = 5.1 Volts Accuracy(6) Sensitivity (0 to 85C) (0 to 85C)
NOTES: 1. 1.0kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25C.
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Motorola Sensor Device Data
MPX4080D ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION and SIGNAL CONDITIONING
Figure 2 shows the sensor output signal relative to differential pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C using the decoupling circuit shown in Figure 4. The output will saturate outside of the specified pressure range.
5 4.5 4 3.5 OUTPUT (V) 3 2.5 2 1.5 1 0.5 0 10 20 30 40 50 60 70 80 OFFSET (TYP) 0 MIN VS = 5.1 Vdc TA = 25C MPX4080
MAX TYP OUTPUT RANGE (TYP) SPAN RANGE (TYP)
PRESSURE (kPa)
Figure 2. Output versus Pressure Differential
FLUORO SILICONE GEL DIE COAT WIRE BOND
DIE
STAINLESS STEEL METAL COVER EPOXY PLASTIC CASE
LEAD FRAME
Figure 3 illustrates the differential sensing chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX4080D pressure sensor operating characteristics, internal reliability, and qualification tests are based on use of dry air as the pressure media. Media, other
1.0 mF
Figure 4. Recommended power supply decoupling and output filtering. For additional output filtering, please refer to Application Note AN1646.
Motorola Sensor Device Data
EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE
DIFFERENTIAL/GAUGE ELEMENT
DIE BOND
Figure 3. Cross-Sectional Diagrams (Not to Scale)
than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 4 shows the recommended decoupling circuit for interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended.
+5 V
Vout Vs IPS 0.01 mF GND 470 pF OUTPUT
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MPX4080D Transfer Function (MPX4080D)
Nominal Transfer Value: Vout = VS (P x 0.01059 + 0.11280) +/- (Pressure Error x Temp. Mult. x 0.01059 x VS) VS = 5.1 V 0.25V P kPa
Temperature Error Multiplier
Break Points MPX4080D Temp - 40 0 to 85 +105 Multiplier 3 1 2
4.0 3.0 2.0 1.0 0.0
-40
-20
0
20
40
60
80
100
120
130
140
Temperature in C NOTE: The Temperature Multiplier is a linear response from 0 to -40C and from 85 to 105C.
Pressure Error Band
Error Limits for Pressure
3.0 2.0 Error (kPa) 1.0 0.0 -1.0 -2.0 -3.0 0 20
40
60
80
100
120
Pressure in kPa
MPX4080D
Pressure 0 to 6 kPa 0 to 60 kPa 60 to 80 kPa Error (max) 1.8 kPa 1.5 kPa 2.3 kPa
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Motorola Sensor Device Data
MPX4080D PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The Motorola pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side is identified by the stainless steel cap.
ORDERING INFORMATION: The MPX4080D is available only in the unibody package.
Device Order No No. MPX4080D Device Type Differential Case No. No 867 Device Marking MPX4080D
Motorola Sensor Device Data
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MPX4080D PACKAGE DIMENSIONS
C R M B -A- N
PIN 1 SEATING PLANE
1 2 3 4 5 6
POSITIVE PRESSURE (P1)
NOTES: 7. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 8. CONTROLLING DIMENSION: INCH. 9. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). DIM A B C D F G J L M N R S OPEN GROUND +VOUT +VSUPPLY -VOUT OPEN INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66
L
-T- G F D 6 PL 0.136 (0.005)
M
J S
TA
M
STYLE 1: PIN 1. 2. 3. 4. 5. 6.
VOUT GROUND VCC V1 V2 VEX
STYLE 2: PIN 1. 2. 3. 4. 5. 6.
OPEN GROUND -VOUT VSUPPLY +VOUT OPEN
STYLE 3: PIN 1. 2. 3. 4. 5. 6.
CASE 867-08 ISSUE N
BASIC ELEMENT
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Motorola Sensor Device Data
MPX4080D
NOTES
Motorola Sensor Device Data
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MPX4080D
Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. MOTOROLA and the logo are registered in the US Patent & Trademark Office. All other product or service names are the property of their respective owners. E Motorola, Inc. 2001. How to reach us: USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1-303-675-2140 or 1-800-441-2447 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3-20-1, Minami-Azabu. Minato-ku, Tokyo 106-8573 Japan. 81-3-3440-3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2 Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852-26668334 Technical Information Center: 1-800-521-6274 HOME PAGE: http://www.motorola.com/semiconductors/
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Motorola Sensor Device Data
MPX4080D/D

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